Title:
塗布液供給装置
Document Type and Number:
Japanese Patent JP4606576
Kind Code:
B2
Inventors:
Nishio Tsutomu
Wei Shitan
Wei Shitan
Application Number:
JP2000401194A
Publication Date:
January 05, 2011
Filing Date:
December 28, 2000
Export Citation:
Assignee:
Chugai Furnace Industry Co., Ltd.
International Classes:
F04B53/10; B05C11/10; F04B13/00
Domestic Patent References:
| JP58220911A | ||||
| JP8304392A |
Attorney, Agent or Firm:
Aoyama Aoi
Yasumichi Furukawa
Atsushi Maeda
Yoshiyuki Maebori
Yasumichi Furukawa
Atsushi Maeda
Yoshiyuki Maebori