Title:
塗布液供給装置
Document Type and Number:
Japanese Patent JP4224106
Kind Code:
B2
Inventors:
Nishio Tsutomu
Wei Shitan
Wei Shitan
Application Number:
JP2007015044A
Publication Date:
February 12, 2009
Filing Date:
January 25, 2007
Export Citation:
Assignee:
Chugai Furnace Industry Co., Ltd.
International Classes:
F04B53/10; B05C11/10; F04B13/00
Domestic Patent References:
| JP2002200452A | ||||
| JP2002130589A | ||||
| JP50127203A | ||||
| JP2004097885A | ||||
| JP2006051407A |
Attorney, Agent or Firm:
Hiroshi Yamazaki
Mitsuo Tanaka
Atsushi Maeda
Yoshiyuki Maebori
Mitsuo Tanaka
Atsushi Maeda
Yoshiyuki Maebori