COATING METHOD AND COATING APPARATUS

Title:

COATING METHOD AND COATING APPARATUS

Document Type and Number:

Japanese Patent JP2005185909

Kind Code:

A

Abstract:

To provide a method and an apparatus for obtaining a coating film having highly accurate film thickness in coating treatment.

The coating method for supplying a coating agent by a spray nozzle comprises a step to control the flow rate of the coating agent to be sent forcibly to the spray nozzle by feeding back the thickness of the coating film measured by quartz crystal microbalance (QCM).

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Inventors:

SHIRATORI TOKIAKI
TOJO SHIGEO

Application Number:

JP2003428565A

Publication Date:

July 14, 2005

Filing Date:

December 25, 2003

Export Citation:

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Assignee:

SNT CO
YOKOHAMA YUSHI KOGYO KK

International Classes:

B05D1/02; B05B12/08; (IPC1-7): B05D1/02; B05B12/08

Domestic Patent References:

JP2003240697A	2003-08-27
JP2001240999A	2001-09-04
JP2003170108A	2003-06-17
JP2002139370A	2002-05-17
JP2001294134A	2001-10-23

Attorney, Agent or Firm:

Kiyoshi Fujino
Kiyonori Fujino
Kyoko Yoshimi
Sanae Goto

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