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Title:
COATING METHOD AND COATING APPARATUS
Document Type and Number:
Japanese Patent JP2008124280
Kind Code:
A
Abstract:

To provide a coating method and coating apparatus for coating an entire surface of a substrate with a coating solution in a substantially uniform thickness.

The coating method of coating the surface of the substrate 1 with a coating solution 2 includes a solvent treatment process as a pretreatment process or an aftertreatment process for the coating process of applying the coating solution 2, in which a marginal part of the substrate 1 is selectively exposed to an atmosphere of a solvent 2a contained in the coating solution 2.


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Inventors:
MOMOSE SHINYA
Application Number:
JP2006307107A
Publication Date:
May 29, 2008
Filing Date:
November 13, 2006
Export Citation:
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Assignee:
SEIKO EPSON CORP
International Classes:
H01L21/027; B05C5/02; B05C9/10; B05C9/12; B05D1/26; B05D3/10
Domestic Patent References:
JPH08141484A1996-06-04
JP2005186040A2005-07-14
JP2006116454A2006-05-11
JP2001232270A2001-08-28
JPH05146737A1993-06-15
JP2005011996A2005-01-13
Attorney, Agent or Firm:
Hiroyuki Kurihara
Muranaka



 
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