Title:
塗布方法及び塗布装置
Document Type and Number:
Japanese Patent JP5430697
Kind Code:
B2
Inventors:
Naoki Fujita
Application Number:
JP2012050567A
Publication Date:
March 05, 2014
Filing Date:
March 07, 2012
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
H01L21/027; B05C9/06; B05C9/10; B05D1/26; B05D1/36; B05C5/02
Domestic Patent References:
| JP2002059058A | ||||
| JP9164357A | ||||
| JP2003289032A | ||||
| JP2003126760A | ||||
| JP2005217282A | ||||
| JP2003059823A | ||||
| JP2004098012A |
Attorney, Agent or Firm:
Filial piety Sasaki