Title:
COATING METHOD FOR LASER BUFFER SET AND SECURING UNIT THEREFOR
Document Type and Number:
Japanese Patent JP3217989
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To realize more uniform coating of material by securing a parallel hexagonal device to a holder on a pair of device holding surfaces, setting the holder in a vacuum chamber and realizing a surface coating environment in the vacuum chamber thereby holding a laser bar in a small region.
SOLUTION: When meshed thin plates 50 (50-1, 50-2,..., 50-n) are fully opened, a laser bar 90 is set on a laser bar holding surface such that a first pair of facing major surfaces 96, 98 abut on the laser bar holding surface. When a cross member 32 is pulled toward a second end 38 by the tensile force of a spring 34 and fastened thereto, the surfaces 100, 102 of the laser bar 90 are flush with each major surface of a securing unit 20 and exposed to coating process while being secured. A plurality of carrier frames loaded with the securing unit 20 are arranged in the vacuum chamber of a CVD system. Each carrier frame turns to pass the container of coating material and the major surfaces 100, 102 facing the steam through the steam.
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Inventors:
Uptal Kumar Chakra Batri
Paul Sangon Chen
George John Purgevillek
Dominique paul linaud
Paul Sangon Chen
George John Purgevillek
Dominique paul linaud
Application Number:
JP11896497A
Publication Date:
October 15, 2001
Filing Date:
May 09, 1997
Export Citation:
Assignee:
Lucent Technologies, Inc.
International Classes:
H01S5/00; C23C14/50; H01S5/028; (IPC1-7): H01S5/028
Domestic Patent References:
| JP60140780A | ||||
| JP63273388A | ||||
| JP3268382A | ||||
| JP6384971U |
Attorney, Agent or Firm:
Masao Okabe (12 others)