PURPOSE: To form Ti compound coating film having a sufficient abrasion resisting property and adhesive strength, by mixing more than one kind of hydrocarbon and N2 gas with higher Ti iodide and forming Ti compound under a specific condition introducing the above mixed gas on the substrate.
CONSTITUTION: The iodine 12 is heated controlling the temperature of the thermostat 13. A fixed quantity of iodine gas is generated and mixed gas mixed the above iodine gas with reaction gas containing hydrocarbon or N2 gas, is introduced to the Ti sponge 10 and then, TiI4 is formed. The above mixed gas is introduced to the substrate 6 made of ultra hard alloy, heated at 800W1200°C and coating film of TiC or TiN or Ti(C,N), is formed on the substrate 6 reacting under less than 0.5 Torr. of reduced pressure.
URA MITSURU
HONDA HARUHIKO
| JP43001371A | ||||
| JPS4983679A | 1974-08-12 |