PURPOSE: To prevent a soln. from going round the rear side of a solid by mounting the solid on a rotary supporting table, and rotating the solid while ejecting a gas or liquid outward from between the solid and the rotary supporting table thereby spraying the soln. onto a surface.
CONSTITUTION: A solid 3 for coating a soln. is mounted on a supporting table 1, and while the solid 3 is rotated, the soln. is coated on the surface of the solid 3. A gas such as air, gaseous N2 or gaseous CO2 or fluid such as solvent is ejected outward through the fluid blow holes 4 between the solid 3 and the table 1. Therefore, the soln. 7 dropped on the solid 3 is spread on the top surface of the solid 3 by the rotation of the table 1, and further when it drips by creeping on the side surface 3a, this is blown off by the fluid ejecting through the holes 4, whereby the going of the soln. 7 round the rear side of the solid 3 is prevented.
JPH05305262 | COATING APPARATUS |
JP3587776 | Coating device and coating method |
JPH03209714 | RESIST APPLICATOR |
JPS52123172A | 1977-10-17 |