Title:
境界潤滑状態となる高温で動作する堆積物のコーティングおよびその方法
Document Type and Number:
Japanese Patent JP6636728
Kind Code:
B2
Abstract:
A metal doped carbon coating wherein the Me- doped C coating is for operation in boundary lubrication conditions, in which the metal is present in the coating in an amount of from 5 to 20% by atomic percent, i.e. the ratio of the number of atoms of the metal Me to the number of atoms of the carbon C does not exceed 1:4. The coating is made by pre-treating a workpiece surface by simultaneous bombardment of the surface with accelerated ions of W, Mo and C ions generated by a HIPIMS discharge in a treatment chamber. This is followed by deposition of a transition layer of metal and/or metal nitride of a thickness in the range from 20nm-1000nm thick by magnetron sputtering optionally in the form of or including HIPIMS sputtering, the metal being at least one of W and Mo. Thereafter a main layer the main layer of Me- doped C coating is deposited by HIPIMS sputtering.
Inventors:
Hob Sepian, Pap Ken Yi.
Duel World, Dave
Teatema, roll
Ehi Asarian, Altian Papken
Duel World, Dave
Teatema, roll
Ehi Asarian, Altian Papken
Application Number:
JP2015124446A
Publication Date:
January 29, 2020
Filing Date:
June 22, 2015
Export Citation:
Assignee:
IHI Hauzer Techno Coating B.V.
International Classes:
C23C14/06; C23C14/34; F02F5/00; F16C3/04; F16C9/02; F16J9/26
Domestic Patent References:
| JP2003247060A | ||||
| JP2014530772A | ||||
| JP2013167012A | ||||
| JP2013529249A |
Foreign References:
| US5458927 |
Attorney, Agent or Firm:
Patent Corporation MIP