Title:
COATING NOZZLE FOR LIQUID AND COATING DEVICE AND COATING METHOD
Document Type and Number:
Japanese Patent JP2001179157
Kind Code:
A
Abstract:
To provide a coating nozzle for liquid capable of forming a uniform coating film with a small quantity of a coating liquid on a circular surface, preventing the physical staining in the forming process and processing for a shorter time.
In the coating nozzle 30 for liquid having a thin plate like space part 42 for housing the liquid inside and a discharge port 36 structured by opening the end part of the space part 42 outside, a feed port 46 for feeding the liquid to the space part 42 and a 1st suction port 50 arranged almost at both end parts of the space part 42 and formed by drawing both end parts of the tip directing a discharge port 36 for the liquid into the space part 42 are provided.
Inventors:
HARUKAWA SUMIO
Application Number:
JP36827599A
Publication Date:
July 03, 2001
Filing Date:
December 24, 1999
Export Citation:
Assignee:
HIRATA SPINNING
International Classes:
B05D1/40; B05C5/02; B05C11/08; H01L21/027; (IPC1-7): B05C5/02; B05C11/08; B05D1/40; H01L21/027
Attorney, Agent or Firm:
Yasunori Otsuka (1 person outside)
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