COATING SOLUTION FOR THIN FILM HAVING HIGH DIELECTRIC AND PREPARING METHOD FOR DIELECTRIC THIN FILM USING IT, AND DIELECTRIC THIN FILM PREPARED THEREBY AND EMBEDDED CAPACITOR COMPRISING DIELECTRIC THIN FILM

Japanese Patent JP2007126354

A

To provide a coating solution for the preparing of a high dielectric constant thin film and a preparing method for the dielectric thin film using the coating solution.

The coating solution comprises a titanium alkoxide, a beta-diketone or its derivative, and a benzoic acid derivative having an electron donating group. The method comprises spin coating the coating solution on a substrate to form a thin film and drying the thin film at a low temperature to crystallize the thin film. The titanium-containing coating solution is highly stable. In addition, the coating solution achieves the formation of a thin film at a low temperature, regardless of the kind of substrates, and can be used to form dielectric thin films in an in-line mode in the production processes of PCBs.

JP7441795	titanium dioxide particles
JPH0791066	PROBLEM TO BE SOLVED: To produce titanium oxide fine particles
WO/2006/061367	PROCESS FOR PREPARING DISPERSIONS OF TIO2 IN THE FORM OF NANOPARTICLES, AND DISPERSIONS OBTAINABLE WITH THIS PROCESS AND FUCTIONALIZATION OF SURFACES BY APPLICATION OF TIO2 DISPERSIONS

BAE JUN HEE
KIN SHOKEN
CHUNG YUL KYO
SONG WON HOON
LIM SUNG TAEK
JIN HYUN JU

JP2006272931A

May 24, 2007

October 04, 2006

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SAMSUNG ELECTRO MECH

C01G23/053; H01B3/00; H01B19/00; H01L21/316; H05K1/16; H01G4/33

JPS6197159A	1986-05-15
JPH08208225A	1996-08-13
JPH10249211A	1998-09-22
JPH1160211A	1999-03-02
JP2003253157A	2003-09-10
JP2004107179A	2004-04-08
JP2003255522A	2003-09-10

Jun Takamura

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