Title:
COATING VARNISH FOR INSULATING FILM AND INSULATING FILM
Document Type and Number:
Japanese Patent JP2001279174
Kind Code:
A
Abstract:
To provide an insulating film for semi-conductor use excellent in all of heat property, electric property, physical property, and mechanical property, and especially having heat resistance and extremely low permittivity.
A varnish for coating comprising at least one kind of polybenzoxazole precursor (1) having a repeating unit represented by formula (A) (wherein (n) is an integer of 0-1,000, and X, Y, and Z each shows a group selected from the structure represented by formulas (B), (C), and (D), respectively), an organic compound (2) having as thermal decomposition temperature of 200-400°C, and an organic solvent (3) capable of simultaneously dissolving the above (1) and (2) is prepared and made into a film.
More Like This:
| JPH10231281 | SEMICARBAZIDE COMPOSITION |
| WO/2003/097755 | RADIATION CURABLE COATING COMPOSITION |
| JP2007023226 | COATING MATERIAL |
Inventors:
SAITO HIDENORI
HIGASHIDA NOBUHIRO
ISHIKAWA TADAHIRO
HIGASHIDA NOBUHIRO
ISHIKAWA TADAHIRO
Application Number:
JP2000089677A
Publication Date:
October 10, 2001
Filing Date:
March 28, 2000
Export Citation:
Assignee:
SUMITOMO BAKELITE CO
International Classes:
C09D179/06; C09D125/04; C09D133/12; C09D171/00; C09D179/04; H01B3/30; H01L21/768; H01L23/522; (IPC1-7): C09D179/06; C09D125/04; C09D133/12; C09D171/00; C09D179/04; H01B3/30; H01L21/768
Domestic Patent References:
| JP2001035256A | 2001-02-09 | |||
| JPH11181094A | 1999-07-06 | |||
| JPH10316853A | 1998-12-02 | |||
| JPH05102125A | 1993-04-23 | |||
| JP2000290590A | 2000-10-17 | |||
| JP2001217235A | 2001-08-10 | |||
| JP2001226484A | 2001-08-21 | |||
| JP2001035256A | 2001-02-09 | |||
| JPH11181094A | 1999-07-06 | |||
| JPH10316853A | 1998-12-02 | |||
| JPH05102125A | 1993-04-23 | |||
| JP2000290590A | 2000-10-17 | |||
| JP2001217235A | 2001-08-10 | |||
| JP2001226484A | 2001-08-21 |
Other References:
JPN6010033371, Ｐｏｌｙｍｅｒ Ｐｒｅｐｒｉｎｔｓ （Ａｍｅｒｉｃａｎ Ｃｈｅｍｉｃａｌ Ｓｏｃｉｅｔｙ， Ｄｉｖｉｓｉｏｎ ｏｆ Ｐｏｌｙｍｅｒ Ｃｈｅｍｉｓｔｒｙ）, 1997, ３８（１）, Ｐ１８０−１
JPN6010033373, Ｐｏｌｙｍｅｒ Ｐｒｅｐｒｉｎｔｓ （Ａｍｅｒｉｃａｎ Ｃｈｅｍｉｃａｌ Ｓｏｃｉｅｔｙ， Ｄｉｖｉｓｉｏｎ ｏｆ Ｐｏｌｙｍｅｒ Ｃｈｅｍｉｓｔｒｙ）, 1996, ３７（２）, Ｐ３１３−４
JPN6010033376, Ｐｏｌｙｍｅｒ Ｐｒｅｐｒｉｎｔｓ （Ａｍｅｒｉｃａｎ Ｃｈｅｍｉｃａｌ Ｓｏｃｉｅｔｙ， Ｄｉｖｉｓｉｏｎ ｏｆ Ｐｏｌｙｍｅｒ Ｃｈｅｍｉｓｔｒｙ）, 1994, ３５（１）, Ｐ５５１−２
JPN6010033373, Ｐｏｌｙｍｅｒ Ｐｒｅｐｒｉｎｔｓ （Ａｍｅｒｉｃａｎ Ｃｈｅｍｉｃａｌ Ｓｏｃｉｅｔｙ， Ｄｉｖｉｓｉｏｎ ｏｆ Ｐｏｌｙｍｅｒ Ｃｈｅｍｉｓｔｒｙ）, 1996, ３７（２）, Ｐ３１３−４
JPN6010033376, Ｐｏｌｙｍｅｒ Ｐｒｅｐｒｉｎｔｓ （Ａｍｅｒｉｃａｎ Ｃｈｅｍｉｃａｌ Ｓｏｃｉｅｔｙ， Ｄｉｖｉｓｉｏｎ ｏｆ Ｐｏｌｙｍｅｒ Ｃｈｅｍｉｓｔｒｙ）, 1994, ３５（１）, Ｐ５５１−２