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Patent Searching and Data


Title:
COATING VARNISH FOR INSULATING FILM AND INSULATING FILM
Document Type and Number:
Japanese Patent JP2003268304
Kind Code:
A
Abstract:

To provide an insulating film excelling in all aspects of thermal, electrical, physical and mechanical characteristics for use in semiconductor field, particularly having thermal resistance and very low dielectric constant.

This coating varnish comprises (1) a polybenzoxazol precursor having repeating units expressed by general formula (A), or general formulae (A) and (F), wherein n is an integer of 0 to 1,000 and m is an integer of 10 to 1,000, (2) an organic compound having 200 to 400°C thermal decomposition temperature and (3) an organic solvent capable of simultaneously dissolving or dispersing both of component (1) and component (2). This insulating film is produced by preparing the coating varnish and making it into a film.


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Inventors:
HIGASHIDA NOBUHIRO
ENOKI HISAFUMI
Application Number:
JP2002072686A
Publication Date:
September 25, 2003
Filing Date:
March 15, 2002
Export Citation:
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Assignee:
SUMITOMO BAKELITE CO
International Classes:
C09D179/04; C08G73/22; C09D5/25; C09D125/00; C09D133/12; C09D171/02; H01B3/30; H01L21/312; (IPC1-7): C09D179/04; C08G73/22; C09D5/25; C09D125/00; C09D133/12; C09D171/02; H01B3/30; H01L21/312