To improve the efficiency of analysis by executing the acquisition of the angle-dependent actual measured data of signal strength and simulation computation by multiprocessing, and sequentially displaying the actual measured data and the results of the computation on the same screen of a display device for every angle.
An operation processor 3 operates a measuring device 1 based on the inputted angle-dependent measuring conditions and acquires the actual measured data of the signal strength at every angle by a measurement executing process part 3a. Furthermore, a simulation computing part 3c performs the simulation operation of ion scattering strength, based on the inputted crystal structure data and the angle-dependent measuring conditions and obtains the signal strength at every angle. The operation processor 3 executes the acquisition of the actual measured data and the simulation computation by multiprocessing. At the same time, the actual measured data obtained at each processing, and the results of the computation are sequentially displayed on the same screen of a display device 4, by a display control part 3d every time the measurement and computation for each angle are completed.
SHINOHARA MAKOTO
NISHIHARA TAKAHARU
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