Title:
COBALT-CONTAINING COMPOUNDS, SYNTHESIS THEREOF, AND USE THEREOF IN DEPOSITION OF COBALT-CONTAINING FILMS
Document Type and Number:
Japanese Patent JP2018118989
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide cobalt compounds suitable for deposition of cobalt-containing films.SOLUTION: The cobalt-containing compounds are represented by the formulas. (Each of R, R, R, Rand Ris independently selected from the group consisting of H and linear, cyclic or branched hydrocarbon groups; provided that (a) R≠Rand/or Rwhen R, Rand Rare hydrocarbon groups, (b) Rand Rare hydrocarbon groups when Ris H, or (c) Ris a C2-C4 hydrocarbon group when Rand Rare H.SELECTED DRAWING: None
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Inventors:
GATINEAU SATOKO
KO CHANGHEE
JEAN MARC GIRARD
JULIEN GATINEAU
KO CHANGHEE
JEAN MARC GIRARD
JULIEN GATINEAU
Application Number:
JP2018064077A
Publication Date:
August 02, 2018
Filing Date:
March 29, 2018
Export Citation:
Assignee:
AIR LIQUIDE
International Classes:
C07F19/00
Domestic Patent References:
| JP2006257073A | 2006-09-28 |
Other References:
AYLETT, B. J.; TANNAHILL, A. A. ET AL.: "Chemical vapor deposition of metal silicides from organometallic compounds with silicon-metal bonds", VACUUM, vol. volume 35 numbers 10-11, JPN6018041229, 1985, pages 435-439
KREISZ,J. ET AL: "Reaction of silylcobalt tetracarbonyls with oxiranes. Kinetics and mechanism", JOURNAL OF ORGANOMETALLIC CHEMISTRY, vol. Vol.451, Nos.1-2, JPN7017003116, 1993, pages 53-7
HAGEN, ARNULF P.; MACDIARMID, ALAN G.: "Recalculation of force constants in carbon and silicon cobalt tetracarbonyls", INORGANIC CHEMISTRY, vol. 6(10), JPN6018041230, 1967, pages 1941-1942
STREET, ANDREW C. ET AL.: "Silylation of coordinated dinitrogen by silylcobalt complexes. Preparation of a new series of silyl", CHEMISTRY LETTERS, vol. No.3, JPN6018041233, 1991, pages 383-386
SAFIULLAH,S. ET AL: "Synthesis and characterization of complexes Me2Si[Co(CO)4]2 and Me2Si[Co(CO)3]2(dppe)", JOURNAL OF THE BANGLADESH CHEMICAL SOCIETY, vol. 9, no. 1, JPN7017003117, 1996, pages 117-120
ABRAHAM,K.M. ET AL: "Synthesis of heteropolymetallic silanes", INORGANIC CHEMISTRY, vol. 12, no. 12, JPN7017003118, 1973, pages 2850-6, XP001229300, DOI: doi:10.1021/ic50130a022
SOMMER, LEO H.; LYONS, J. E.; FUJIMOTO, HIROSHI: "Stereochemistry of asymmetric silicon. XV. Stereospecific hydrosilation and exchange reactions of", JOURNAL OF THE AMERICAN CHEMICAL SOCIETY, vol. 91(25), JPN6018041231, 1969, pages 7051-7061
CERVEAU, GENEVIEVE; COLOMER, ERNESTO; CORRIU, ROBERT J. P.: "Cleavage of silicon- and germanium-transition metal bonds. Dependence of the stereochemistry on the", JOURNAL OF ORGANOMETALLIC CHEMISTRY, vol. 236(1), JPN6018041232, 1982, pages 33-52
KREISZ,J. ET AL: "Reaction of silylcobalt tetracarbonyls with oxiranes. Kinetics and mechanism", JOURNAL OF ORGANOMETALLIC CHEMISTRY, vol. Vol.451, Nos.1-2, JPN7017003116, 1993, pages 53-7
HAGEN, ARNULF P.; MACDIARMID, ALAN G.: "Recalculation of force constants in carbon and silicon cobalt tetracarbonyls", INORGANIC CHEMISTRY, vol. 6(10), JPN6018041230, 1967, pages 1941-1942
STREET, ANDREW C. ET AL.: "Silylation of coordinated dinitrogen by silylcobalt complexes. Preparation of a new series of silyl", CHEMISTRY LETTERS, vol. No.3, JPN6018041233, 1991, pages 383-386
SAFIULLAH,S. ET AL: "Synthesis and characterization of complexes Me2Si[Co(CO)4]2 and Me2Si[Co(CO)3]2(dppe)", JOURNAL OF THE BANGLADESH CHEMICAL SOCIETY, vol. 9, no. 1, JPN7017003117, 1996, pages 117-120
ABRAHAM,K.M. ET AL: "Synthesis of heteropolymetallic silanes", INORGANIC CHEMISTRY, vol. 12, no. 12, JPN7017003118, 1973, pages 2850-6, XP001229300, DOI: doi:10.1021/ic50130a022
SOMMER, LEO H.; LYONS, J. E.; FUJIMOTO, HIROSHI: "Stereochemistry of asymmetric silicon. XV. Stereospecific hydrosilation and exchange reactions of", JOURNAL OF THE AMERICAN CHEMICAL SOCIETY, vol. 91(25), JPN6018041231, 1969, pages 7051-7061
CERVEAU, GENEVIEVE; COLOMER, ERNESTO; CORRIU, ROBERT J. P.: "Cleavage of silicon- and germanium-transition metal bonds. Dependence of the stereochemistry on the", JOURNAL OF ORGANOMETALLIC CHEMISTRY, vol. 236(1), JPN6018041232, 1982, pages 33-52
Attorney, Agent or Firm:
Mitsue Obuchi
Yukio Fuse
Yukio Fuse