To provide a cold cathode element that is easily manufactured by a manufacturing process not damaging a catalyst thin-film and includes fine carbon fibers each having a diameter finer than that of the conventional one.
The cold cathode element 10 includes a glass substrate 11, a cathode electrode layer 12 formed on the glass substrate 11, a granular catalyst thin-film 13 successively formed on the cathode electrode layer 12, a first protective layer 14 and a second protective layer 15, an insulating layer 16 formed on the cathode electrode layer 12, a gate electrode layer 17 formed on the insulating layer 16, and fine carbon fibers 19 that emit electrons according to the electric field. The cold cathode element includes a configuration such that the first protective layer 14 is formed of a material that is dissolved by an alkaline etchant and the fine carbon fibers 19 each having a diameter finer than that of the conventional one are grown in a manufacturing process not damaging the granular catalyst thin-film 13.
SAKAI TOSHIKATSU
SAITO NOBUO
| JP2005005229A | 2005-01-06 | |||
| JP2007324107A | 2007-12-13 | |||
| JP2004051432A | 2004-02-19 | |||
| JP2002197965A | 2002-07-12 | |||
| JP2007188662A | 2007-07-26 |
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