PURPOSE: To provide a cold cathode gauge which stably operates even at a low pressure.
CONSTITUTION: When a magnet 5 is provided around a discharge section 4 within a vacuum meter container 3 of a cold cathode gauge 2 and a magnetic field created by the magnet 5 is allowed to cross the magnetic field created by an anode electrode 17 nearly at right angle, electrons perform a movement similar to the spiral movement within the discharge section 4. In this case, members 6, 7, 8, and 9 with high permeability are provided on the path of a line of magnetic force passing through the discharge section 4 and a magnetic path for enabling the line of magnetic force to easily pass through the discharge section 4 is formed, thus reinforcing the magnetic field within the discharge section 4 and stably generating plasma even at a high vacuum state. The members 6, 7, 8, and 9 with high permeability are provided on the path of the line of magnetic force and the distance where the line of magnetic force passes within the discharge section 4 is reduced, thus the magnetic field is further increased to improve performance.
NAKAMURA SHIZUO