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Title:
COLD CATHODE IONIZATION GAUGE AND DISCHARGE START ASSIST ELECTRODE PLATE FOR USE IN THE SAME
Document Type and Number:
Japanese Patent JP2010151623
Kind Code:
A
Abstract:

To provide a cold cathode ionization gauge that induces discharge in a short time even when used for a long time without complicating the device.

The cold cathode ionization gauge includes a rod-shaped anode 2, a probe container (cathode) 1 surrounding the anode, and a magnet 3 provided on the periphery of the cathode 1. A discharge start assist electrode 5 having an acute protrusion 21 toward the central axial direction of the anode 2 is arranged in a discharge space 9 of the cathode 1. The discharge start assist electrode 5 is provided on the cathode 1 in a removable manner. The tip of the acute protrusion 21 of the discharge start assist electrode 5 and the anode 2 are arranged spaced apart from each other by ≥0.3 mm.

COPYRIGHT: (C)2010,JPO&INPIT


Inventors:
KAWASAKI HIROSADA
Application Number:
JP2008330217A
Publication Date:
July 08, 2010
Filing Date:
December 25, 2008
Export Citation:
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Assignee:
CANON ANELVA CORP
International Classes:
G01L21/34
Domestic Patent References:
JP2008304360A2008-12-18
JP2010145119A2010-07-01
Attorney, Agent or Firm:
Jyohei Yamashita
Michio Nagai