To provide a cold cathode ionization gauge that induces discharge in a short time even when used for a long time without complicating the device.
The cold cathode ionization gauge includes a rod-shaped anode 2, a probe container (cathode) 1 surrounding the anode, and a magnet 3 provided on the periphery of the cathode 1. A discharge start assist electrode 5 having an acute protrusion 21 toward the central axial direction of the anode 2 is arranged in a discharge space 9 of the cathode 1. The discharge start assist electrode 5 is provided on the cathode 1 in a removable manner. The tip of the acute protrusion 21 of the discharge start assist electrode 5 and the anode 2 are arranged spaced apart from each other by ≥0.3 mm.
COPYRIGHT: (C)2010,JPO&INPIT
JP2008304360A | 2008-12-18 | |||
JP2010145119A | 2010-07-01 |
Michio Nagai