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Patent Searching and Data


Title:
COLD CATHODE IONIZATION GAUGE
Document Type and Number:
Japanese Patent JPH1019711
Kind Code:
A
Abstract:

To make an apparatus compact and light-weight by arranging a magnet inside a vacuum container and constituting an anode or a cathode of the magnet.

A vacuum container 1 is mounted via a flange 2 to a flange 3 of a vacuum container to be measured. An anode 4 is constituted of a cylindrical magnet arranged coaxially with an axis of the vacuum container 1 and connected to an electrode 6 via a connecting part 5. The electrode 6 is fixed to a wall of the vacuum container 1 via an insulating body 7, to which a d.c. voltage of 2 to 3.5kV is applied. Plate-like cathodes 8 are arranged above and below the anode 4. Because of the constitution, an electric field and a magnetic field are present in a space between the anode 4 and cathode 8. When electrons are generated in each space, the electrons collide with a residual gas in the space, bringing about continuous discharging. Since a discharging current depends on the amount of the residual gas, a pressure of the container to be measured can be detected by measuring the discharging current.


Inventors:
TAKAGI NOZOMI
CHIN KOKUKA
Application Number:
JP17624396A
Publication Date:
January 23, 1998
Filing Date:
July 05, 1996
Export Citation:
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Assignee:
ULVAC CORP
International Classes:
G01L21/34; (IPC1-7): G01L21/34
Attorney, Agent or Firm:
Shigeru Yagita (3 outside)