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Title:
COLD-CATHODE IONIZATION GAUGE
Document Type and Number:
Japanese Patent JP2014048264
Kind Code:
A
Abstract:

To provide a cold-cathode ionization gauge that prolongs lifetimes of a discharge induction member and an anode by suppressing sticking of a product material due to a discharge between the discharge induction member and a tip part of the anode and also suppressing consumption.

A cold-cathode ionization gauge including a cylindrical cathode 101, a rod-like anode 102 arranged in an internal space of the cylindrical cathode 101, magnetic means 103a, 103b of generating a discharge between the anode and the cathode by producing a magnetic field substantially orthogonal to an electric field between the anode and the cathode, and a discharge induction member 105 arranged in the cathode, includes a shield plate 2 which partitions the internal space of the cathode 101 into one space A2 in which a tip part of the anode 102 and the discharge induction member 105 are arranged and the other space A1.


Inventors:
CHIBA TAKAHIRO
YOKOYAMA TORU
Application Number:
JP2012194042A
Publication Date:
March 17, 2014
Filing Date:
September 04, 2012
Export Citation:
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Assignee:
DIA SHINKU KK
International Classes:
G01L21/34
Domestic Patent References:
JP2010145119A2010-07-01
JP2010276597A2010-12-09
Attorney, Agent or Firm:
Kinoshita Shigeru