Title:
COLD-CATHODE IONIZATION GAUGE
Document Type and Number:
Japanese Patent JP2018036132
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a cold ionization guage suppressing a non-discharge and an abnormal discharge, suppressing a time delay between the time when a high voltage is applied to a cold-cathode ionization guage and the time when an electric current starts to flow by discharge, and suppressing fluctuation of a measurement pressure value.SOLUTION: A cold-cathode ionization guage 1 includes: an anode bar 52; and a discharge induction member 3 provided on one face side of a pole piece 2. The discharge induction member 3 includes: a main body part 3b formed in a ring shape; and a plurality of protrusions 3a extended in a direction opposite to the pole piece 2 from one end part of the main body part 3b. The cold-cathode ionization guage is positioned on a center O of a virtual circle in which a center line L of the anode bar 52 is formed by top end parts 3a1 of the plurality of protrusions 3a. A gap t is formed between the circumferential surface of the anode bar 52 and the top end parts 3a1 of the plurality of protrusions 3a. Moreover, a top end part 52a of the anode bar 52 is positioned at the pole piece 2 moving from the top end parts 3a1 of the plurality of protrusions 3a.SELECTED DRAWING: Figure 2
Inventors:
CHIBA TAKAHIRO
YOKOYAMA TORU
YOKOYAMA TORU
Application Number:
JP2016169198A
Publication Date:
March 08, 2018
Filing Date:
August 31, 2016
Export Citation:
Assignee:
DIA SHINKU KK
International Classes:
G01L21/34
Attorney, Agent or Firm:
Kinoshita Shigeru