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Title:
COLD CATHODE IONIZATION VACUUM GAUGE, VACUUM PROCESSING APPARATUS INCLUDING THE SAME, AND DISCHARGE STARTING AUXILIARY ELECTRODE
Document Type and Number:
Japanese Patent JP2010276597
Kind Code:
A
Abstract:

To provide a cold cathode ionization vacuum gauge for triggering discharge in a short time even when using over a long period of time without complicating an apparatus.

The cold cathode ionization vacuum gauge includes the structure in which a rod-like anode 2 is located in an internal part of a measuring element container (cathode) 1 having a discharge space 9 whose one end is sealed, and a discharge starting auxiliary electrode 5 is mounted on this anode 2. The discharge starting auxiliary electrode 5 triggers the discharge in a short time by the formation of a carbon nano tube layer 10 on a discharge starting auxiliary electrode plate 7.


Inventors:
KAWASAKI HIROSADA
KIKUCHI TOSHIO
Application Number:
JP2010047685A
Publication Date:
December 09, 2010
Filing Date:
March 04, 2010
Export Citation:
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Assignee:
CANON ANELVA CORP
International Classes:
G01L21/34
Domestic Patent References:
JP2007517233A2007-06-28
JP2007184226A2007-07-19
JPS6120561U1986-02-06
JP2008304361A2008-12-18
JP2007024849A2007-02-01
JPH10510921A1998-10-20
JP2007517233A2007-06-28
JP2007184226A2007-07-19
JPS6120561U1986-02-06
Attorney, Agent or Firm:
Okabe
Masao Okabe
Nobuaki Kato
Asahi Shinmitsu
Katsumi Miyama



 
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