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Patent Searching and Data


Title:
COLD CATHODE IONIZATION VACUUM GAUGE
Document Type and Number:
Japanese Patent JP2011133386
Kind Code:
A
Abstract:

To provide a cold cathode ionization vacuum gauge using a permanent magnet as a member for inducing discharge, and readily generating discharges by arranging the permanent magnet on a pole piece.

The cold cathode ionization vacuum gauge 1 includes: a cylindrical cathode 43 having an opening formed on one end; a rod-shaped anode 44, arranged in an internal space of the cathode; magnetic means 45a, 45b for forming a magnetic field orthogonal to the electric field between the anode and the cathode, and generating discharge between the anode and the cathode; a pole piece 14, removably fitted to an opening edge of the cathode for covering the opening; and the permanent magnet 4 arranged on the pole piece 14.


Inventors:
CHIBA TAKAHIRO
YOKOYAMA TORU
Application Number:
JP2009293972A
Publication Date:
July 07, 2011
Filing Date:
December 25, 2009
Export Citation:
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Assignee:
DIA SHINKU KK
International Classes:
G01L21/34
Attorney, Agent or Firm:
Kinoshita Shigeru