Title:
冷陰極電離真空計
Document Type and Number:
Japanese Patent JP5000386
Kind Code:
B2
Inventors:
Tsuyoshi Miyashita
Ryota Tanaka
Ryota Tanaka
Application Number:
JP2007152666A
Publication Date:
August 15, 2012
Filing Date:
June 08, 2007
Export Citation:
Assignee:
ULVAC, Inc.
International Classes:
G01L21/34
Domestic Patent References:
| JP95198A | ||||
| JP347085Y1 | ||||
| JP60534U | ||||
| JP5047483U | ||||
| JP5264389A |
Attorney, Agent or Firm:
Junichi Omori
Ori Akira
Yasuo Iisaka
Ori Akira
Yasuo Iisaka