Title:
冷陰極電離真空計及び圧力測定方法
Document Type and Number:
Japanese Patent JP5249112
Kind Code:
B2
Inventors:
Watanabe Excitation
Fumio Watanabe
Fumio Watanabe
Application Number:
JP2009087633A
Publication Date:
July 31, 2013
Filing Date:
March 31, 2009
Export Citation:
Assignee:
Ampere Co., Ltd.
Limited company vacuum laboratory
Limited company vacuum laboratory
International Classes:
G01L21/34
Domestic Patent References:
| JP49021078U | ||||
| JP54082684U | ||||
| JP2007322266A | ||||
| JP2008537998A |
Attorney, Agent or Firm:
Keizo Okamoto