Title:
COLD-CATHODE TYPE IONIZATION VACUUM GAUGE WITH CALIBRATION FUNCTION
Document Type and Number:
Japanese Patent JP2013040914
Kind Code:
A
Abstract:
To provide a method for calibrating a measurement error caused by change of situation of a sensor, particularly a method for easy calibration of a cold-cathode type ionization vacuum gauge at a production field.
Displays of a measuring instrument 12 with correct display and a measuring instrument 1 with error are displayed in an E2 PROM data reference system, and calibration is performed in a state where both sensors are in the same atmosphere. Also, calibration of a cold-cathode type ionization vacuum gauge 1 is performed in a spot system.
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Inventors:
IIJIMA YOSHIO
Application Number:
JP2011206609A
Publication Date:
February 28, 2013
Filing Date:
August 15, 2011
Export Citation:
Assignee:
TOYO DENSHI KENKYUSHO KK
International Classes:
G01L27/00; G01L21/34
Domestic Patent References:
| JP2011205266A | 2011-10-13 | |||
| JP2010534323A | 2010-11-04 | |||
| JP2004198328A | 2004-07-15 | |||
| JPH1151757A | 1999-02-26 | |||
| JP2008523410A | 2008-07-03 | |||
| JP2005188980A | 2005-07-14 | |||
| JP2000065668A | 2000-03-03 | |||
| JPH07253812A | 1995-10-03 |