Title:
コールドヘッドの製造方法
Document Type and Number:
Japanese Patent JP6549756
Kind Code:
B2
Abstract:
A rare earth regenerator material particle and a regenerator material particle group having a high long-term reliability, and a superconducting magnet, an examination apparatus, a cryopump and the like using the same are provided. A rare earth regenerator material particle contains a rare earth element as a constituent component, and in the particle, a peak indicating a carbon component is detected in a surface region by an X-ray photoelectron spectroscopy analysis.
Inventors:
Katsuhiko Yamada
Keiichi Fuse
Keiichi Fuse
Application Number:
JP2018090393A
Publication Date:
July 24, 2019
Filing Date:
May 09, 2018
Export Citation:
Assignee:
Toshiba Corporation
Toshiba Materials Co., Ltd.
Toshiba Materials Co., Ltd.
International Classes:
F25B9/00; C09K5/14; H01L39/04
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Foreign References:
| WO1997031226A1 |
Attorney, Agent or Firm:
Patent Business Corporation Sakura International Patent Office