Title:
コールドトラップおよびコールドトラップの制御方法
Document Type and Number:
Japanese Patent JP5748682
Kind Code:
B2
Abstract:
A cold trap includes two individually controllable cooling units. The cold trap is provided in an evacuation path for connecting a vacuum chamber to a turbomolecular pump, The first cooling unit includes a first panel unit provided in the evacuation path such that the panel is exposed, and a first refrigerator thermally coupled to the first panel unit so as to cool the first panel unit. The second cooling unit includes a second panel unit provided in the evacuation path such that the panel is exposed, and a second refrigerator thermally coupled to the second panel unit so as to cool the second panel unit. The first panel unit is spaced apart from the second panel unit.
Inventors:
Hidekazu Tanaka
Application Number:
JP2012018835A
Publication Date:
July 15, 2015
Filing Date:
January 31, 2012
Export Citation:
Assignee:
Sumitomo Heavy Industries Ltd.
International Classes:
F04B37/08; F04B37/16
Domestic Patent References:
| JP6058258A |
Foreign References:
| WO2011075110A1 | ||||
| US3579997 |
Attorney, Agent or Firm:
Sakaki Morishita
Yusuke Murata
Tomoyuki Miki
Tomisho Teruo
Yusuke Murata
Tomoyuki Miki
Tomisho Teruo