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Title:
COLLIMATING DEVICE FOR SHORT WAVELENGTH OPTICAL SYSTEM
Document Type and Number:
Japanese Patent JPH01156700
Kind Code:
A
Abstract:
PURPOSE:To decrease the loss of the quantity of light by combining a reflecting optical element and aperture or slit. CONSTITUTION:The beam radiated from a short wavelength light source 3 disposed at the focus of a paraboloidal mirror 1 is reflected by said mirror. Of the light reflected from the paraboloidal mirror 1, the diverged and converged beams which are not collimated are removed from an aperture or slit 2. The reflecting optical element is otherwise constituted of a hyperboloidal mirror 4 and paraboloidal mirror 1 which co-possess the focus. The beam is radiated from the focus F2 of the hyperboloidal mirror 4. The one focus F1 of the hyperboloidal mirror 4 and the focus of the paraboloidal mirror 1 are made common. The collimated short wavelength beams are thereby easily obtd. and the compact optical system having the decreased loss of the quantity of the light is thus obtd.

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Inventors:
TANIKAI YOSHIKO
KOHATA KEIJI
MITOMI OSAMU
YAMAUCHI ATSUSHI
Application Number:
JP31683087A
Publication Date:
June 20, 1989
Filing Date:
December 15, 1987
Export Citation:
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Assignee:
NIKON CORP
International Classes:
G01N23/00; G02B17/00; G02B27/30; G21K1/02; G21K1/06; (IPC1-7): G01N23/00; G02B17/00; G02B27/30; G21K1/02; G21K1/06
Domestic Patent References:
JP55113955B
JPH01102398A1989-04-20
JPS5627930A1981-03-18
JPS61167846A1986-07-29
JPS52136592A1977-11-15
Attorney, Agent or Firm:
Takao Watanabe



 
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