Title:
COLOR FILTER FOR SOLID IMAGE PICKUP DEVICE AND MANUFACTURING METHOD THEREOF
Document Type and Number:
Japanese Patent JP2006339256
Kind Code:
A
Abstract:
To provide a color filter for a solid image pickup device for preventing metal foreign matters, such as abatement, from adhering to a surface again, and to provide a method for manufacturing the color filter.
The surface of the color filter for a solid image pickup device is oxidized. As the oxidation treatment, plasma oxidation utilizing, for example O2 gas, is suitable.
Inventors:
TAGUCHI YASUSHI
Application Number:
JP2005159684A
Publication Date:
December 14, 2006
Filing Date:
May 31, 2005
Export Citation:
Assignee:
IWATE TOSHIBA ELECTRONICS CO
TOSHIBA CORP
TOSHIBA CORP
International Classes:
H01L27/14; G02B5/20
Attorney, Agent or Firm:
Amagi International Patent Office