Title:
組み合わせ式真空ポンプ・ロードロック組立体
Document Type and Number:
Japanese Patent JP4886207
Kind Code:
B2
Abstract:
A load-lock and dry vacuum pump assembly includes a load-lock having a load-lock housing, the load-lock housing includes a mating system having a flange-like cylinder and a cylinder concentrically located relative to said flange-like cylinder; a dry vacuum pump that includes a shaft, a rotor, a first concentric cylinder and a second concentric cylinder extending outwardly from the rotor, and is integrally connected with the mating system, the first and second dry vacuum pump concentric cylinders, the flange-like cylinder, and the cylinder concentrically located relative to said flange being axially arranged with respect to the shaft; and a molecular drag compression stage formed by flanges having helical structures selectively provided on the first and second concentric cylinders, the flange-like cylinder, and the cylinder concentrically located relative to the flange. The first and second concentric cylinders spin relative to the flange-like cylinder and the cylinder concentrically located relative to the flange.
Inventors:
Graeme Huntley
Neil Jeffrey Bernie
Neil Jeffrey Bernie
Application Number:
JP2005111962A
Publication Date:
February 29, 2012
Filing Date:
April 08, 2005
Export Citation:
Assignee:
Edwards Vacuum Incorporated
International Classes:
F04B37/16; F04C25/02; F04B17/00; F04B23/00; F04D23/00; F04D29/60
Domestic Patent References:
| JP7176586A | ||||
| JP8288262A | ||||
| JP2001182685A | ||||
| JP10022357A | ||||
| JP10089285A | ||||
| JP11247790A |
Attorney, Agent or Firm:
Shinjiro Ono
Kazuo Shamoto
Yasushi Kobayashi
Akio Chiba
Hiroyuki Tomita
Wataru Kitakita
Kazuo Shamoto
Yasushi Kobayashi
Akio Chiba
Hiroyuki Tomita
Wataru Kitakita