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Title:
COMBINED VACUUM PUMP/LOAD LOCK ASSEMBLY
Document Type and Number:
Japanese Patent JP2005299659
Kind Code:
A
Abstract:

To provide a load lock and dry vacuum pump assembly for performing low pressure exhaustion of a load lock chamber at low cost without depending on batch processing.

The assembly comprises the load lock having a load lock housing 15; a dry vacuum pump 12 including a shaft, a rotor and first and second concentric cylinders extending outward from the rotor and integrally connected to a connection system, the first and second dry vacuum pump concentric cylinders, the flanged cylinder and the cylinder arranged concentric with the flanged cylinder being arranged on the shaft in the axial direction; and a molecular suction compression stage selectively provided on the first and second concentric cylinders, the flanged cylinder or the cylinder arranged concentric with the flanged cylinder and formed with a flange having a spiral structure.


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Inventors:
Huntley, Graeme
Bellenie, Neil Geoffrey
Application Number:
JP2005000111962
Publication Date:
October 27, 2005
Filing Date:
April 08, 2005
Export Citation:
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Assignee:
BOC GROUP INC:THE
International Classes:
F04C25/02; F04B17/00; F04B23/00; F04B37/16; F04D23/00; F04D29/60; (IPC1-7): F04B37/16; F04C25/02
Domestic Patent References:
JPH1089285A
JPH11247790A
JPH07176586A
JPH08288262A
JP2001182685A2001-07-06
JPH1022357A
Attorney, Agent or Firm:
社本 一夫
増井 忠弐
小林 泰
千葉 昭男
富田 博行
内田 博