Title:
COMPACT DEFLECTING MAGNET
Document Type and Number:
Japanese Patent JP2018190709
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a compact magnet for deflection and focusing of electrons and ion beams.SOLUTION: A particle beam device including a magnet includes: a particle beam source configured to emit electrons and ion beams; a plurality of yokes arranged in a substantially rectangular shape; and a coil set including a plurality of coils. In the device, windings of the plurality of coils are uniformly distributed across and wound around the plurality of yokes, the coil set is configured to produce both dipole and quadrupole fields, and the magnet is configured to deflect and focus electrons and ion beams.SELECTED DRAWING: Figure 1
More Like This:
Inventors:
ROY E RAND
VITALIY ZISKIN
VITALIY ZISKIN
Application Number:
JP2018082367A
Publication Date:
November 29, 2018
Filing Date:
April 23, 2018
Export Citation:
Assignee:
IMATREX INC
International Classes:
H01J3/32; H01J29/76; H01J37/147
Domestic Patent References:
| JPS5225562A | 1977-02-25 | |||
| JPS50117727U | 1975-09-26 |
Foreign References:
| US4105890A | 1978-08-08 |
Attorney, Agent or Firm:
Ryoichi Takaoka
Nao Oda
Akiyo Iwahori
Kaoru Takahashi
Nao Oda
Akiyo Iwahori
Kaoru Takahashi