Title:
COMPACT HIGH-SENSITIVITY MICROSCOPIC INCLINATION DETECTOR
Document Type and Number:
Japanese Patent JP2001153634
Kind Code:
A
Abstract:
To provide a compact general purpose microscopic inclination detector of an optical lever type, having high sensitivity of an inclination angle resolution of about 10-5 rad or better.
A semiconductor laser is used for making a detector small, size, the optical path length of reflected light is extended with a mirror to about 100 mm, and a semiconductor laser beam that tends to diverge is almost focused on a measuring surface with a lens to obtain a high sensitivity. The sensitive microscopic inclination detector having a small size of 91×37×25(mm3) or 91×30×25(mm3) and a microscopic inclination angle resolution of 10-5 rad or better can be obtained.
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Inventors:
TANI KOUJI
HIGASHIYA MITSURU
HIGASHIYA MITSURU
Application Number:
JP33609099A
Publication Date:
June 08, 2001
Filing Date:
November 26, 1999
Export Citation:
Assignee:
HITACHI LTD
FAIBURABO KK
FAIBURABO KK
International Classes:
G11B5/84; G01B11/26; G01C9/00; G01C9/06; (IPC1-7): G01B11/26; G01C9/00; G11B5/84
Attorney, Agent or Firm:
Kenjiro Take
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