To provide a compensation optical system of compact size.
The compensation optical system includes: a wavefront sensor that receives reflected light of light irradiated from a light source toward an object and detects the wavefront of the object; a wavefront corrector arranged in an optically conjugated position with respect to the wavefront sensor to correct wavefront aberration obtained based on the detected result of the wavefront detected by the wavefront sensor; and a common optical system for propagating light from a first intermediate image irradiated from the light source and condensed, through a first optical path, allowing the propagated light to be incident to the wavefront corrector, and propagating the light reflected by the wavefront corrector, through a second optical path different from the first optical path so as to be condensed as a second intermediate image different from the first intermediate image. The wavefront corrector is arranged in an entrance pupil position of the common optical system, and the first intermediate image and the second intermediate image are condensed on the image surface of the common optical system based on the entrance pupil position.
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Shiro Takayanagi
Yasuhiro Otsuka
Shuji Kimura
Osamu Shimoyama
Nagakawa Yukimitsu