Title:
補正ユニット、照明光学系、露光装置、およびデバイス製造方法
Document Type and Number:
Japanese Patent JP5187636
Kind Code:
B2
Inventors:
Kyoji Mizuno
Application Number:
JP2009007199A
Publication Date:
April 24, 2013
Filing Date:
January 16, 2009
Export Citation:
Assignee:
NIKON CORPORATION
International Classes:
H01L21/027; G02B19/00; G03F7/20
Domestic Patent References:
| JP2002033272A | ||||
| JP3180019A | ||||
| JP5127086A | ||||
| JP2001284237A | ||||
| JP201097975A | ||||
| JP201067943A | ||||
| JP201028089A | ||||
| JP201028088A | ||||
| JP2009267390A | ||||
| JP2170152A |
Foreign References:
| WO2010061674A1 | ||||
| WO2010032585A1 | ||||
| WO2009101958A1 |
Attorney, Agent or Firm:
Takao Yamaguchi