PURPOSE: To prevent short circuit between electrodes and improve work efficiency by enlarging the opening area of the light introduction window in a transparent electrode layer as compared with the areas of the opening in a lower electrode layer and a photoelectric transfer layer.

CONSTITUTION: A light introduction window opened in the picture element of a light screening layer 2, a lower electrode layer 4, a photoelectric transfer layer 5, and an upper transparent electrode layer 6. The light introduction window 8 of the transparent electrode layer 6 consisting of an indium film is made large in area than that of the Cr electrode 4 patterned in advance, that of the photoelectric transfer layer 5 consisting of a-Si:H patterned lastly, etc. Therefore, even in the case that the conductive foreign matter 16 adheres to the sidewall of the window 8, the electrode layers 6 and 4 are not connected electrically by the foreign matter 16, the short circuit occurrence between the upper and lower electrodes 4 and 6 can be prevented. Even in the case that the position of the introduction window 8 is deviated from the electrode layer 4, the photoelectric transfer layer 5 never fills up one part of the light introduction window 8 in contrast to past, and the drop of sensor output or the drop of brightness does not occur, and the margin in mask alignment is great, and work efficiency improves.