Title:
COMPLEX SENSOR
Document Type and Number:
Japanese Patent JPH0344530
Kind Code:
A
Abstract:
PURPOSE:To make the pressure receiving area/the total area of a sensor chip maximum thereby to improve the sensitivity by forming the sensor chip in a regular square. CONSTITUTION:A chip 1 is formed in a regular square. A differential pressure detecting diaphragm 2 is provided to be almost in contact with an inner periphery of the square chip 1. A static pressure detecting diaphragm 4 is placed in an area enclosed by an outer periphery of the chip 1 and the differential pressure detecting diaphragm 2. Moreover, the central portion of the diaphragm 2 is relatively thick as compared with a thin portion therearound. A piezoelectric resistance element 6 is provided in the thin portion. In this structure, the differential pressure receiving area/total area of the chip and the static pressure receiving area/total area of the chip are rendered maximum, so that the greatest sensitivity is gained. When the sensitivity is constant, the area is minimum, whereby the number of chips obtained from one wafer becomes maximum.
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Inventors:
UKAI SEIICHI
SHIMADA SATOSHI
SHIMADA SATOSHI
Application Number:
JP17814489A
Publication Date:
February 26, 1991
Filing Date:
July 12, 1989
Export Citation:
Assignee:
HITACHI LTD
International Classes:
G01L9/04; G01L9/00; G01L13/02; (IPC1-7): G01L9/04; G01L13/02
Attorney, Agent or Firm:
Katsuo Ogawa (2 outside)
Next Patent: WATER DROP DETECTING APPARATUS