PURPOSE: To obtain the composite bias magnetoresistance effect head which is improved in heat resistance by continuously forming 'Permalloy(R)' and Nb films on a substrate to impart the electrical conduction of both and oxidizing the surface of Nb thereafter, then forming a soft magnetic material film.
CONSTITUTION: The 'Permalloy(R)' 2 which is a magnetoresistance effect material is formed by a vapor deposition method on an insulator substrate 1 and in succession, the Nb 3 is formed by the vapor deposition method thereon to impart the electrical conduction of both. The surface of the Nb 3 is then oxidized to form an electrical insulating layer, by which a shunt film 3 is obtd. An Fe-Si alloy film 4 which is a soft magnetic material is formed by a sputtering method thereon. The composite bias magnetoresistance effect type element to which the shunt bias by the Nb and the soft magnetic material bias by the Fe-Si alloy film are impressed is obtd. in this way. Au or Al is deposited by evaporation as an electrode 5. Consequently, the width for adoption of the high-temp. process for the production of the magnetic head is expanded and the life and reliability when the head is operated at a high current density are improved.
SHIMIZU NOBORU
TANABE HIDEO
SHIGEMATA KAZUHIRO
YUHITO ISAMU
OTOMO MOICHI
KOYAMA NAOKI
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