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Title:
COMPOSITE FOR POLISHING AND POLISHING METHOD USING IT
Document Type and Number:
Japanese Patent JP2006150482
Kind Code:
A
Abstract:

To provide a composite for polishing more ideally usable in usage to polish an oxide monocrystal substrate, etc.

This composite for polishing contains an abrasive, an aldose derivative which is at least either one of acid provided by oxidation of aldose and its salt and water.


Inventors:
HOSHIYA SACHIKO
TOMATSU MASATOSHI
Application Number:
JP2004342932A
Publication Date:
June 15, 2006
Filing Date:
November 26, 2004
Export Citation:
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Assignee:
FUJIMI INC
International Classes:
B24B37/00; C09K3/14
Domestic Patent References:
JP2004331886A2004-11-25
JPH0284485A1990-03-26
JP2002114967A2002-04-16
JPH1088111A1998-04-07
JP2000110596A2000-04-18
JPH10172937A1998-06-26
JP2002241739A2002-08-28
JPH09208933A1997-08-12
JP2001093866A2001-04-06
JP2000233377A2000-08-29
Attorney, Agent or Firm:
Hironobu Onda
Makoto Onda



 
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