Title:
COMPOSITE SENSOR AND COMPOSITE TRANSFER DEVICE USING IT
Document Type and Number:
Japanese Patent JP3238001
Kind Code:
B2
Abstract:
PURPOSE: To provide a composite sensor and a composite transfer device using it wherein maximum output is obtained at static pressure input and the effect of differential pressure is suppressed.
CONSTITUTION: Static pressure gauges 23a-23d are arranged on static pressure diaphragms 22a-22d. The static pressure gauges 23a and 23c are arrayed so that their longitudinal direction is parallel to the radius direction of the circle circumscribing the diaphragms 22a and 22c and also to that circumscribing a differential pressure diaphragm 21. The static pressure gauges 23b and 23d are so arranged that their longitude direction is parallel to the tangent direction of the circle circumscribing the diaphragms 22b and 22d and parallel to the radius direction of the circle circumscribing a differential pressure diaphragm 21. The static pressure gauges 23a and 23b are connected to the high potential side of a wheatstone bridge circuit, and the static pressure gauges 23c and 23d are connected to the low potential side of the bridge circuit. Thus, the effect of differential pressure is suppressed, and the maximum differential pressure output is obtained from the bridge circuit.
Inventors:
Seiichi Ukai
Satoshi Shimada
Yukio Takahashi
Satoshi Shimada
Yukio Takahashi
Application Number:
JP10681394A
Publication Date:
December 10, 2001
Filing Date:
May 20, 1994
Export Citation:
Assignee:
株式会社日立製作所
International Classes:
G01F1/38; G01L9/00; G01L13/06; (IPC1-7): G01L13/06
Domestic Patent References:
| JP6361929A | ||||
| JP341777A | ||||
| JP4212032A | ||||
| JP572069A |
Attorney, Agent or Firm:
Kasuga
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