Title:
COMPOSITE SENSOR
Document Type and Number:
Japanese Patent JP3107516
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To realize a composite sensor which can detect by single sensor the water level and water quality or the flow rate and water quality in the water storage system such as reservoir, paddy field, etc.
SOLUTION: A first glass substrate 2 having a pressure introduction port 21 for introducing the pressure of a fluid to be measured is arranged on one side of a diaphragm for measuring the differential pressure of a pressure sensor 1. A second glass substrate 3 is arranged opposite to the sensor 2 with the substrate 2 and a spacer 4 in between. A pressure introduction port 31 is formed on the plate 3 to introduce a pressure of a fluid to be measured, at the opposite position to the port 21. Conductive films 23 and 33 are formed on the facing surfaces of the substrates 2 and 3 respectively, so that the conductivity and inductivity showing the water qaulity of the fluid to be measured between the films 23 and 33 can be measured. Thus, composite sensor capable of measuring the differential pressure (flow rate) and water quality with single sensor can be realized.
Inventors:
Seiichi Ukai
Yasunori Shoji
Koji Shimizu
Yasunori Shoji
Koji Shimizu
Application Number:
JP11073196A
Publication Date:
November 13, 2000
Filing Date:
May 01, 1996
Export Citation:
Assignee:
株式会社日立製作所
International Classes:
G01F23/14; G01D21/00; G01D21/02; G01F1/38; G01F23/18; G01L9/00; G01L13/06; G01L19/00; G01L19/06; G01N27/06; G01N33/18; (IPC1-7): G01D21/02; G01D21/00; G01F23/14; G01N27/06
Domestic Patent References:
| JP594177A | ||||
| JP63305229A | ||||
| JP1503001A |
Attorney, Agent or Firm:
Kasuga