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Title:
COMPOSITION FOR CONTRAST INTENSIFYING LAYER, ALKYLNITRONS AND USE THEREOF
Document Type and Number:
Japanese Patent JPS6352129
Kind Code:
A
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Inventors:
POORU RICHIYAADO UESUTO
GARII CHIYAARUZU DEBISU
KAREN ARINA REGU
Application Number:
JP17502987A
Publication Date:
March 05, 1988
Filing Date:
July 15, 1987
Export Citation:
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Assignee:
GEN ELECTRIC
International Classes:
G03F7/095; C07C291/02; G03C1/00; G03C1/73; G03F7/09; G03F7/26; H01L21/027; (IPC1-7): G03C1/00; G03C1/72
Domestic Patent References:
JPS52148304A1977-12-09
JPS53116145A1978-10-11
JPS61121050A1986-06-09
JPS61121051A1986-06-09
JPS6269259A1987-03-30
JPS62215939A1987-09-22
JPS62258352A1987-11-10
JPS61180242A1986-08-12
JPS61161253A1986-07-21
JPS60500957A1985-06-27
JPS62116553A1987-05-28



 
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