To form an insulating film whose burying property and flatness are enhanced, whose permeability is reduced and whose degradation is reduced with reference to an oxygen plasma, by a method wherein a composition is provided with a structure wherein a plurality of phosphorus atoms of phosphonoimide whose main chain is specific are bridged by a specific siloxane bond.
A composition is constituted of a polymer provided with a structure wherein a plurality of phosphorus atoms of phosphonoimide whose main chain is expressed by Formula I are cross-linked by a siloxane bond which is expressed by Formula II. In Formula I, (n) represents an integer of 3 or higher, and Formula II expresses a composition such as dimethyldioxosilicon ((CH3)2Si(O-)2), monomethyltrioxosilicon ((CH3)Si(O-)3) or tetraoxosilicon (Si(O-)4). Thereby, it is possible to form an insulating film whose burying property and flatness are excellent whose dielectric constant is small and whose degradation is small with reference to an oxygen plasma.
MURA NAOMI