Title:
COMPOSITION FOR METAL OXIDE-CONTAINING LAYER FORMATION, AND METHOD FOR MANUFACTURING ELECTRONIC DEVICE
Document Type and Number:
Japanese Patent JP2015128156
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a method for forming a metal oxide-containing layer with high uniformity without being influenced by a composition with high ink stability and a humidity environment; and a method for readily manufacturing an electronic device having a high electric property.SOLUTION: A composition for metal oxide-containing layer formation comprises: an unsaturated metal carboxylate expressed by the formula (I); and a hydrate. (In the formula, Mrepresents a metal atom of m valences; m is an integer of 2-5; [CRR=CR-COO]m may be identical to each other or not.)
Inventors:
OTSUBO SAIKA
ARAMAKI SHINJI
ARAMAKI SHINJI
Application Number:
JP2014241992A
Publication Date:
July 09, 2015
Filing Date:
November 28, 2014
Export Citation:
Assignee:
MITSUBISHI CHEM CORP
International Classes:
H01L21/368; C01G9/02; H01L21/336; H01L29/786; H01L51/46; H01L51/50; H05B33/10
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