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Title:
COMPOSITION FOR PHOTOCURABLE NANOIMPRINT AND PATTERNING METHOD
Document Type and Number:
Japanese Patent JP2014003284
Kind Code:
A
Abstract:

To provide a composition for photocurable nanoimprint having excellent etching resistance of chlorine gas, facilitating transfer of a pattern, and ensuring excellent adhesion of the pattern to a substrate, excellent releasability from a die, good dispersibility, and excellent productivity.

The composition for photocurable nanoimprint contains (A) a hydrolysis mixture containing a hydrolysate of fluorination organic silane compound, a hydrolysate of an organic silicon compound having a (meth)acryl group, and a hydrolysate of a specific metal alkoxide, (B) a polymerizable monomer having a (meth)acryl group, and (C) a photopolymerization initiator. A hydrolysate of an organic silicon compound may be added to the hydrolysis mixture of (A).


Inventors:
UMEKAWA HIDEKI
KANAGAWA KIYOTADA
Application Number:
JP2013106889A
Publication Date:
January 09, 2014
Filing Date:
May 21, 2013
Export Citation:
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Assignee:
TOKUYAMA CORP
International Classes:
H01L21/027; B29C59/02; C08G77/58; C08G79/00; C08F230/08; C08F290/06
Domestic Patent References:
JP2010067935A2010-03-25
JP2009206196A2009-09-10
JP2010006870A2010-01-14
JP2008202022A2008-09-04
JPH06293879A1994-10-21
JP2005527110A2005-09-08
JP2009208317A2009-09-17
JP2008194894A2008-08-28
JP2011074128A2011-04-14
JP2003340844A2003-12-02
JPH0327002A1991-02-05
Foreign References:
WO2012053543A12012-04-26
WO2012002413A12012-01-05
WO2011161944A12011-12-29
WO2011148890A12011-12-01