研磨パッド用組成物及びこれを用いた研磨パッド

Title:

研磨パッド用組成物及びこれを用いた研磨パッド

Document Type and Number:

Japanese Patent JP4259069

Kind Code:

B2

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Inventors:

Takahiro Okamoto
Toru Hasegawa
Nobuo Kawahashi

Application Number:

JP2002245830A

Publication Date:

April 30, 2009

Filing Date:

August 26, 2002

Export Citation:

Assignee:

JSR CORPORATION

International Classes:

C08L47/00; B24B37/20; B24B37/24; C08J5/14; C08L23/08; C08L101/00; H01L21/304

Domestic Patent References:

Attorney, Agent or Firm:

Kiyoshi Kojima

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