Title:
COMPOUND VACUUM PUMP
Document Type and Number:
Japanese Patent JP2011137475
Kind Code:
A
Abstract:
To provide a compound vacuum pump differentiating more efficiently with higher auxiliary pressure.
The vacuum pump includes at least three first exhaust part (106), a second exhaust part (108), and a third exhaust part (110). The third exhaust part (110) is arranged downstream of the first and second exhaust parts, and is formed of a Holweck molecular drag exhaust mechanism (112) and a regeneration exhaust mechanism (114). A rotor element (120) of the molecular drag exhaust mechanism surrounds a rotor element (122) of the regeneration exhaust mechanism.
Inventors:
STONES IAN DAVID
SCHOFIELD NIGEL PAUL
STUART MARTIN NICHOLAS
SCHOFIELD NIGEL PAUL
STUART MARTIN NICHOLAS
Application Number:
JP2011089466A
Publication Date:
July 14, 2011
Filing Date:
April 13, 2011
Export Citation:
Assignee:
EDWARDS LTD
International Classes:
F04D19/04; F04D17/16; F04D23/00
Domestic Patent References:
| JPH06280785A | 1994-10-04 | |||
| JP2002147393A | 2002-05-22 | |||
| JP2003129990A | 2003-05-08 | |||
| JPH11351190A | 1999-12-21 | |||
| JP2001323892A | 2001-11-22 | |||
| JPH094594A | 1997-01-07 | |||
| JP2007507656A | 2007-03-29 |
Attorney, Agent or Firm:
Sadao Kumakura
Shishido Kaichi
Disciple Maru Ken
Ino Sato
Shishido Kaichi
Disciple Maru Ken
Ino Sato