Title:
【発明の名称】複合真空ポンプ
Document Type and Number:
Japanese Patent JPH0726635
Kind Code:
B2
Inventors:
Keijiro Kinoshita
Masashi Yamamoto
Toru Iwata
Masashi Yamamoto
Toru Iwata
Application Number:
JP16039088A
Publication Date:
March 29, 1995
Filing Date:
June 28, 1988
Export Citation:
Assignee:
Daikin Industries, Ltd.
International Classes:
F04D25/16; F04D19/04; F04D23/00; F04D29/30; (IPC1-7): F04D19/04; F04D23/00; F04D29/30
Domestic Patent References:
| JP63147989A |
Attorney, Agent or Firm:
Hiroshi Maeda (1 person outside)
Next Patent: ジエツトフアン