Title:
濃度監視システム、濃度管理システムおよび濃度監視方法
Document Type and Number:
Japanese Patent JP7247067
Kind Code:
B2
Abstract:
Provided is a concentration monitoring system which allows continuous concentration monitoring of a processing tank. The concentration monitoring system is provided with a first cycle in which a sample of a processing liquid to which a chemical has been added is taken from a processing tank in which the processing liquid is stored and supplied to a concentration meter which measures the concentration of the chemical, a second cycle in which a chemical solution having a known concentration of the chemical is supplied to the concentration meter, and a control device which controls the first cycle to evaluate the concentration of the chemical in the processing tank on the basis of the concentration of the sample measured by the concentration meter and controls the second cycle to evaluate the precision of the concentration meter on the basis of the concentration of the chemical solution measured by the concentration meter.
Inventors:
Chiyomaru Masaru
Hiroaki Mikawa
Okuzaki Yuichi
Hiroaki Mikawa
Okuzaki Yuichi
Application Number:
JP2019174990A
Publication Date:
March 28, 2023
Filing Date:
September 26, 2019
Export Citation:
Assignee:
MITSUBISHI HEAVY INDUSTRIES,LTD.
International Classes:
G01N33/00; C25D11/04; G01N29/024
Domestic Patent References:
| JP60021443A | ||||
| JP10090275A | ||||
| JP63010233B2 |
Attorney, Agent or Firm:
Yasushi Matsunuma
Eisuke Ito
Hiroyuki Hashimoto
Ancient city Satoshi
Koichiro Kamada
Eisuke Ito
Hiroyuki Hashimoto
Ancient city Satoshi
Koichiro Kamada